Mark your selections and choose between table on screen and file format. Marking tips
For variables marked 
you need to select at least one value
URBAN/RURAL AREA
DISTRICT
HOUSING UNITS, POPULATION
CENSUS YEAR
Number of selected data cells are:(maximum number allowed is 10.000.000)
Presentation on screen is limited to 1.000 rows and 50 columns
Number of selected cells exceeds the maximum allowed 10.000.000